Surface analysis tools
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Surface analysis tools include AES (Auger Electron Spectroscopy) ESCA (Electron Spectroscopy for Chemical Analysis) also known as XPS (X-Ray Photoelectron Spectroscopy) and SSIM (Static Secondary Ion Spectroscopy). Surface analysis tools are most often used to characterize elemental composition and chemistry of the outer surface (top 4 to 5 nm) and employ electron, x-ray, and ion probes, often in combination with depth profiling techniques.
