Image:Spacer Patterning.JPG

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[edit] Summary

Spacer patterning:

First pattern
Deposition of mask material
Etching to form sidewall spacers
Removal of first pattern
Etching using remaining spacers as mask
Removal of spacers, leaving final pattern

[edit] Licensing

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File history

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	Date/Time	Dimensions	User	Comment
current	14:07, 8 March 2008	393×576 (19 KB)	Guiding light (Talk \| contribs)	(Spacer patterning: * First pattern * Deposition of mask material * Etching to form sidewall spacers * Removal of first pattern * Etching using remaining spacers as mask * Removal of spacers, leaving final pattern)