Image:Riediagram.gif
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[edit] Summary
A diagram of a common RIE setup. An RIE consists of two electrodes (1 and 4) that create an electric field (3) meant to accelerate ions (2) toward the surface of the samples (5).
[edit] Licensing
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. |
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 02:48, 19 May 2007 | 516×444 (11 KB) | Dollhous (Talk | contribs) | (A diagram of a common RIE setup. An RIE consists of two electrodes (1 and 4) that create an electric field (3) meant to accelerate ions (2) toward the surface of the samples (5).) |
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