Oxalyl fluoride
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| Oxalyl fluoride | |
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| IUPAC name | Oxalyl difluoride |
| Other names | Oxalyl fluoride, ethanedioyl difluoride |
| Identifiers | |
| CAS number | [359-40-0] |
| PubChem | |
| EINECS number | |
| SMILES | C(=O)(C(=O)F)F |
| InChI | 1/C2F2O2/c3-1(5)2(4)6 |
| Properties | |
| Molecular formula | C2F2O2 |
| Molar mass | 94.017 g/mol |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
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Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[1][2]
[edit] See also
[edit] References
- ^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
- ^ Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. doi:.
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