Octafluorocyclobutane
From Wikipedia, the free encyclopedia
| Octafluorocyclobutane | |
|---|---|
| IUPAC name | 1,1,2,2,3,3,4,4-Octafluorocyclobutane |
| Other names | Freon-C-318, octafluorocyclobutane |
| Identifiers | |
| CAS number | [115-25-3] |
| EINECS number | |
| Properties | |
| Molecular formula | C4F8 |
| Molar mass | 200.03 g/mol |
| Density | 1.654 at -20 °C |
| Melting point |
-40.1 °C |
| Boiling point |
-6 °C |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
|
Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is a compound of carbon and fluorine used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for Ozone depleting chlorofluorocarbon refrigerants.
Octafluorocyclobutane is a dimer of tetrafluoroethylene. Its critical point is at 115.3 °C and 2.79 MPa.

