Octafluorocyclobutane

From Wikipedia, the free encyclopedia

Octafluorocyclobutane
IUPAC name 1,1,2,2,3,3,4,4-Octafluorocyclobutane
Other names Freon-C-318, octafluorocyclobutane
Identifiers
CAS number [115-25-3]
EINECS number 204-075-2
Properties
Molecular formula C4F8
Molar mass 200.03 g/mol
Density 1.654 at -20 °C
Melting point

-40.1 °C

Boiling point

-6 °C

Except where noted otherwise, data are given for
materials in their standard state
(at 25 °C, 100 kPa)

Infobox disclaimer and references

Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is a compound of carbon and fluorine used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant. It has also been investigated as a refrigerant in specialised applications, as a replacement for Ozone depleting chlorofluorocarbon refrigerants.

Octafluorocyclobutane is a dimer of tetrafluoroethylene. Its critical point is at 115.3 °C and 2.79 MPa.

Languages