Laser-microjet
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A Laser-microjet is a water-jet guided laser in which a pulsed laser beam is coupled into a low-pressure water jet. This is used to perform laser cutting functions while using the water jet to guide the laser beam, much like an optical fiber, through total internal reflection. The advantages of this are that the water also removes debris and cools the material. Additional advantages over traditional "dry" laser cutting are high dicing speeds, parallel kerf and omnidirectional cutting. [1]
[edit] References
- ^ Perrottet, D et al.,"Heat damage-free Laser-Microjet cutting achieves highest die fracture strength", Photon Processing in Microelectronics and Photonics IV, edited by J. Fieret, et al., Proc. of SPIE Vol. 5713 (SPIE, Bellingham, WA, 2005)
