Hexafluoroacetylacetone
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| Hexafluoroacetylacetone | |
|---|---|
 |
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| IUPAC name | 1,1,1,5,5,5-Hexafluoro-2,4-pentanedione |
| Other names | Hexafluoroacetylacetone, HfacH |
| Identifiers | |
| CAS number | [1522-22-1] |
| PubChem | |
| Properties | |
| Molecular formula | C5H2F6O2 |
| Molar mass | 208.06 g/mol |
| Appearance | colourless liquid |
| Density | 1.47 g/mL |
| Boiling point |
70-71 °C |
| Solubility in water | organic solvents |
| Hazards | |
| Main hazards | toxic |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
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Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.
This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.[2]
[edit] References
- ^ Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society 69: 1819-20.
- ^ Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron 14: 699-732. doi:.
