Dichlorosilane
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| Dichlorosilane | |
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| IUPAC name | Dichlorosilane |
| Other names | DCS |
| Identifiers | |
| CAS number | [4109-96-0] |
| PubChem | |
| SMILES | ClSiCl |
| Properties | |
| Molecular formula | H2Cl2Si |
| Molar mass | 101.007 g/mol |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
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Dichlorosilane (H2SiCl2), or DCS as it is commonly known, is usually mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.
A higher concentration of DCS:NH3 (ie 16:1), usually results in lower stress nitride films.
[edit] External Links
Safety data for dichlorosilane from the Chemistry Department at Oxford University.
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