Copper silicide
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| Copper silicide | |
|---|---|
| Identifiers | |
| CAS number | [12159-07-8] |
| Properties | |
| Molecular formula | Cu5Si |
| Molar mass | 203.974 |
| Appearance | silver powder |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
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Copper silicide (Cu5Si), also called pentacopper silicide, is an inorganic compound, a silicide of copper. Its CAS number is []. It is a solid crystalline material with the appearance of odorless silver powder or pieces. It is insoluble in water.
Copper silicide thin film is used for passivation of copper surfaces of copper-based chips, where it serves to suppress diffusion and electromigration and serves as a diffusion barrier. [1]
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